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Theoretical compensation of static deformations of freeform multimirror substrates

 
: Hartung, J.; Lukowicz, H. von; Kinast, J.

:

Applied optics 57 (2018), No.15, pp.4020-4031
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
English
Journal Article
Fraunhofer IOF ()

Abstract
Varying temperatures influence the figure errors of freeform metal mirrors by thermal expansion. Furthermore, different materials lead to thermo-elastic bending effects. The paper presents a derivation of a compensation approach for general static loads. Utilizing perturbation theory, this approach works for shape compensation of substrates that operate in various temperature environments. Verification is made using a finite element analysis, which is further used to produce manufacturable CAD models. The remaining low spatial frequency errors are deterministically correctable using diamond turning or polishing techniques.

: http://publica.fraunhofer.de/documents/N-510050.html