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Dispersion-controlled low-coherent interferometry for thin-film characterization

: Preuß, M.; Taudt, Christopher; Nelsen, Bryan; Hartmann, Peter


Gorecki, Christophe (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Micro- and Nanometrology VII : 25-26 April 2018, Strasbourg, France
Bellingham, WA: SPIE, 2018 (Proceedings of SPIE 10678)
ISBN: 978-1-5106-1882-4
ISBN: 978-1-5106-1883-1
Paper 106780R, 8 pp.
Conference "Optical Micro- and Nanometrology" <7, 2018, Strasbourg>
Conference Paper
Fraunhofer IWS ()
imaging spectrometer; interferometry; thin film; thin-film characterization

In this work, a novel experimental procedure for thin-film characterization and its data analysis is described. The presented technique is based on low-coherence interferometry and resolves thicknesses with nm-precision. An element with known dispersion is placed in the interferometer's sample arm and delivers a controlled phase variation in relation to the wavelength. This phase variation is dependent on the thickness of the material and its wavelength-dependent refractive index. Furthermore, the phase variation is characterized by a stationary point, the so called equalization wavelength. Changes in the thickness of the material under test will shift the equalization wavelength and transform its interference amplitude. In combination with an imaging spectrometer thin films are spatially resolved with a spatial resolution of 4 μm within a single acquisition. This makes data acquisition fast. The advantage over other conventionally used methods, like reflectometry and ellipsometry, is that signal processing is greatly simplified and therefore much faster.