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Adaptive measurement method for area chromatic confocal microscopy

: Luo, D.

Fulltext urn:nbn:de:0011-n-5069095 (14 MByte PDF)
MD5 Fingerprint: dea20a758727f5dd013bbd26f6e7e516
Created on: 28.8.2018

Beyerer, Jürgen (Ed.); Pak, Alexey (Ed.); Taphanel, Miro (Ed.):
Joint Workshop of Fraunhofer IOSB and Institute for Anthropomatics, Vision and Fusion Laboratory 2017. Proceedings : July 30 - August 5, 2017, Triberg-Nussbach, Germany
Karlsruhe: KIT Scientific Publishing, 2018 (Karlsruher Schriften zur Anthropomatik 34)
ISBN: 978-3-7315-0779-6
ISBN: 3-7315-0779-X
DOI: 10.5445/KSP/1000081314
Fraunhofer Institute of Optronics, System Technologies and Image Exploitation and Institute for Anthropomatics, Vision and Fusion Laboratory (Joint Workshop) <2017, Triberg-Nussbach>
Conference Paper, Electronic Publication
Fraunhofer IOSB ()

Although well known for its depth discerning capability, conventional confocal microscopy has limited application due to its slow scanning speed. From Nipkow disk to various programmable spatial light modulator, various research has been conducted with the aim of improving the speed of confocal microscopy. Nevertheless, the fundamental conflict between axial sensitivity and lateral density remains unsolved. In this report, a novel adaptive measurement method is proposed based on iterative refinement of the axial measurement as well as condensation of the lateral measurement grid. Initial experimental investigation has shown overall good measurement result with a specific type of artifacts due to inaccurate estimation in earlier measurement stages. Despite of this problem, the proposed system and the accompanying algorithms have shown great potential in improving the measurement speed of area chromatic confocal microscopy.