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Laser-induced forward transfer of aluminium particles in different gaseous environment

: Azhdast, M.H.; Eichler, H.J.; Lang, K.-D.; Glaw, V.; Kossatz, M.


Optical Society of America -OSA-, Washington/D.C.:
Compact EUV & X-ray Light Sources : Part of High-Brightness Sources and Light-Driven Interactions; 26–28 March 2018, Strasbourg France
Washington, DC: OSA, 2018
ISBN: 978-1-943580-40-8
Poster JT5A.21
Conference "Compact EUV & X-ray Light Sources" (EUVXRAY) <2018, Strasbourg>
Conference "High-Brightness Sources and Light-Driven Interactions" <2018, Strasbourg>
Conference Paper
Fraunhofer IZM ()

Laser-induced forward transfer is a novel technique used for Aluminium implementing on wafer substrates in different gaseous environments: vacuum, room atmosphere, Argon and Arcal (F5). The laser pulse energy is optimized during the process.