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  4. Roughness measurements of Al and Cu particles in Laser-Induced forward transferring process
 
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2018
Conference Paper
Title

Roughness measurements of Al and Cu particles in Laser-Induced forward transferring process

Abstract
Cu and Al particles were optimized to create thin films by laser direct transfer on Si-wafer substrate with minimal measured roughness; Cu-LIFT results are especially promising at high repetition rates and minimal pulse energy.
Author(s)
Azhdast, M.H.
Eichler, H.J.
Lang, K.-D.
Glaw, V.
Kossatz, M.
Mainwork
CLEO: Applications and Technology  
Conference
Conference on Lasers and Electro-Optics - Applications and Technology (CLEO A&T) 2018  
DOI
10.1364/CLEO_AT.2018.ATu4M.3
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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