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Simulation based analysis of workshop influences on machine-integrated form testing interferometers

 
: Dörner, D.; Mangalasseril, P.; Pfeifer, T.; Schmitt, R.

Chevrier, F. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
5th international conference of the European Society for Precision Engineering and Nanotechnology 2005. Vol.1 : May 8th - May 11th 2005, Montpellier, France
Montpellier, 2005
ISBN: 92-9900-350-5
pp.189-192
European Society for Precision Engineering and Nanotechnology (International Conference) <5, 2005, Montpellier>
English
Conference Paper
Fraunhofer IPT ()

: http://publica.fraunhofer.de/documents/N-50625.html