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Modular micro reaction system including ceramic components

: Moritz, T.; Lenk, R.; Adler, J.; Zins, M.

International Microelectronics and Packaging Society -IMAPS-; American Ceramic Society -ACerS-, Westerville/Ohio:
IMAPS/ACerS 1st International Conference and Exhibition on CICMT 2005 - Ceramic Interconnect and Ceramic Microsystems Technologies. Proceedings and exhibition presentations. CD-ROM : April 10 - 13, 2005, Baltimore Marriott Waterfront, Baltimore, Maryland
Washington, DC: IMAPS, 2005
ISBN: 0-930815-76-9
7 pp.
International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT) <1, 2005, Baltimore/Md.>
Conference Paper
Fraunhofer IKTS ()
Analysator; chemischer Reaktor; Entwicklungswerkzeug; Kanal=Hohlleitung; Keramikkomponente; Keramikschaum; Labormischer; Mikromodultechnik; Mikrosystem; Rasterelektronenmikroskopie; Reaktionstechnik; rechnerunterstützter Entwurf

The Fraunhofer Alliance Modular Micro Reaction System (FAMOS), consisting of six Fraunhofer institutes, develops a software based micro reaction toolkit provided with all essential elements of conventional chemical devices, e, g. micro reactors, micro mixers, or analysing modules. All these elements are arranged on a single platform. Besides modules made of other materials ceramics play a dominant role for micro reactor components. Their chemical and thermal resistance shows a number of advantages for application in micro reaction technology, especially in such cases when aggressive media are combined with high temperatures.
Ceramic micro mixers and reaction modules containing multi channel plates for screening of catalysts or ceramic self-heating foam structures were developed. For manufacturing of different ceramic components with inherent micro structures generative shaping techniques like low pressure injection moulding or laser ablation technologies can be used. The development of modules including construction, shaping, covering, and testing is shown. The basic component for a ceramic micro reactor is a hexagon made of alumina by low pressure injection moulding containing a rectangular cavity with two fluidic supplies, one on each front side of the cavity which can be covered by a ceramic lid. The density tests of joint micro reactors confirmed that brazed and stacked joints can resist inner pressures of > 18 bar. The flux estimated at this pressure was 16 ml/min.