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High-performance coatings for micromechanical mirrors

: Gatto, A.; Yang, M.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Schenk, H.; Lakner, H.; Heber, J.


Applied optics 45 (2006), No.7, pp.1602-1607
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()
coating; MOEMS; micromechanical mirror

High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.