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InAs/GaSb superlattice focal plane arrays for high performance thermal imaging

InAs/GaSb Übergitter-Detektorfeldmatrizen für Hochleistungsthermographie
: Rehm, R.; Walther, M.; Schmitz, J.; Fleißner, J.; Ziegler, J.; Cabanski, W.; Breiter, R.

AMA Fachverband für Sensorik e.V., Wunstorf:
Sensor + test 2006 Proceedings. OPTO 2006, 7th International Conference on Optical Technologies, Optical Sensors & Measuring Techniques and IRS2 2006, 9th International Conference on Infrared Sensors & Systems : Nürnberg, Germany, 30 May - 1 June 2006
Wunstorf: AMA Service, 2006
ISBN: 3-9810993-0-3
International Conference for Infrared Sensors and Systems (IRS2) <9, 2006, Nürnberg>
International Conference on Optical Technologies, Optical Sensors & Measuring Techniques (OPTO) <7, 2006, Nürnberg>
Conference Paper
Fraunhofer IAF ()
InAs/GaSb; thermal imaging; Thermographie; infrared camera; Infrarotkamera; dual-color; Zweifarben; carbon dioxide; Kohlendioxid; superlattice; Übergitter

We report on our developments of InAs/GaSb superlattice photodiodes for the realization of high performance thermal imaging systems in the mid-wavelength infrared spectral range between 3 and 5 µm. The first, fully operational 256x256 mid-IR camera with a thermal resolution below 10 mk and a very uniform performance has been realized. We show that by increasing the active layer's thickness a quantum efficiency of at least 60% seems feasible. We also present the first bi-spectral 288x384 InAs/GaSb superlattice mid-IR camera featuring a simultaneous detection of both channels on each pixel. The system offers a thermal resolution better than 30 mk for shortwave radiation between 3 to 4 µm and better than 17 mK for the 4-5 µm spectral channel.