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Prospects for the realization of APC in a distributed 300 mm R&D-line

 
: Roeder, G.; Schellenberger, M.; Öchsner, R.; Pfeffer, M.; Frickinger, J.; Pfitzner, L.; Ryssel, H.; Fritzsche, M.

7th European Advanced Equipment Control, Advanced Process Control, AEC/APC 2006. Conference Proceedings. CD-ROM : Aix-en-Provence, France, March 29 - 31, 2006
Aix-en-Provence, 2006
European Advanced Equipment Control / Advanced Process Control Conference (AEC/APC Europe) <7, 2006, Aix-en-Provence>
English
Conference Paper
Fraunhofer IISB ()
APC; 300 mm; multi-site processing

: http://publica.fraunhofer.de/documents/N-50199.html