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Organic Contamination Workshop, SEMICON Europa 2000. Proceedings

Munich, Germany, April 7, 2000
: Pfitzner, L.; Bügler, J.
: Fraunhofer-Institut für Integrierte Schaltungen -IIS-, Erlangen


Stuttgart: Fraunhofer IRB Verlag, 2000, 208 pp.
Organic Contamination Workshop <2, 2000, München>
European Semiconductor Manufacturing Conference (SEMICON Europa) <2000, München>
ISBN: 3-8167-5551-8
ISBN: 978-3-8167-5551-7
Conference Proceedings
Fraunhofer IIS ()

Organic airborne molecular contamination in semiconductor device manufacturing has gained importance over the last few years. With steadily shrinking device geometries, with the introduction of highly sophisticated process technologies and new materials, the control of the wafer environment is of extreme importance. The advent of manufacturing technologies using minienvironments brings new solutions to these problems, but also raises new questions to be answered. A task force within SEMI Europe deals with standardization of test methods for determining levels of organic contamination and the assessment of contamination risks caused by minienvironments themselves. Analytical methods that have been developed recently are partly included in existing standards but also a series of new standards is in progress.