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2006
Conference Paper
Titel
Approach for artificial load generation for acceptance test of AMHS
Abstract
The automated material handling system (AMHS) is a highly automated transport solution of 300mm semiconductor waferfabs. Such a complex system gets tested in several phases of implementation. The first test after installation needs an artificial load due to missing production lots. This paper describes an approach of artificial load generation to conduct acceptance tests without a need of production load.