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Smart and efficient optimization of NED actuators

 
: Schuffenhauer, David; Gaudet, Matthieu; Conrad, Holger

Otto, T. ; Messe Frankfurt; Fraunhofer-Institut für Elektronische Nanosysteme -ENAS-, Chemnitz; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Smart Systems Integration 2018. International Conference and Exhibition on Integration Issues of Miniaturized Systems : Dresden, Germany, 11 - 12 April 2018
Auerbach /Vogtl.: Verlag Wissenschaftliche Scripten, 2018
ISBN: 978-3-95735-082-4
ISBN: 3-95735-082-4
ISBN: 978-1-5108-6771-0 (Ausgabe bei Curran)
pp.496-499
International Conference and Exhibition on Integration Issues of Miniaturized Systems <2018, Dresden>
Smart Systems Integration Conference (SSI) <2018, Dresden>
English
Conference Paper
Fraunhofer IPMS ()

Abstract
Electrostatic micro actuators have significant limitations in travel range due to electrode separation and unstable drive regions. The NED electrostatic - bimorph type - bending actuators can be used to overcome these limitations. The performance of NED actuators is determined by numerous geometrical design parameters. In this work, we present an efficient optimization method for the search for largely bending NED actuators.

: http://publica.fraunhofer.de/documents/N-497366.html