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Dynamic fault injection for system level simulation of MEMS - a design method for functional safety

: Blochmann, Tino; Schneider, Peter; Markwirth, Thomas; Gerth, Stephan; Jancke, Roland

Postprint urn:nbn:de:0011-n-4973576 (705 KByte PDF)
MD5 Fingerprint: 6b49838a42265f1ee9fa844d3bd5296d
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Created on: 27.6.2018

Mailly, Frédérick; Marcelli, Romolo; Mita, Yoshio; Nouet, Pascal; Pressecq, Francis; Schneider, Peter; Smith, Steward ; Institute of Electrical and Electronics Engineers -IEEE-:
Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, DTIP 2018 : Roma, Italy, May 22nd - May 25th, 2018
Piscataway, NJ: IEEE, 2018
ISBN: 978-1-5386-6197-0
ISBN: 978-1-5386-6199-4
ISBN: 978-1-5386-6198-7
ISBN: 978-1-5386-6200-7
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) <20, 2018, Roma>
Bundesministerium für Bildung und Forschung BMBF
16ES0366; RoMulus
Robuste Multisensorik zur Zustandsüberwachung in Industrie 4.0-Anwendungen, Teilvorhaben MEMS-Systemsimulation und drahtloses, latenzarmes Kommunikationssystem
Conference Paper, Electronic Publication
Fraunhofer IIS, Institutsteil Entwurfsautomatisierung (EAS) ()

In this paper a method for dynamic fault injection and fault simulation as well as its application to MEMS based sensor systems is described. The prerequisite for this approach is the avail-ability of accurate, but likewise numerically efficient models for the MEMS element. Simulations based on SystemC and SystemC AMS are suitable to analyze the nominal behavior of complex systems including electronics and the mechanical behavior of the MEMS elements [1], [2]. They offer capabilities to represent analog and digital hardware as well as software and nonelectrical components in one simulation environment. Especially for the modelling of mechanical structures, dedicated modelling algorithms like model order reduction [3], [4] have to be applied to ensure high numerical efficiency.