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High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout

: Weiler, Dirk; Hochschulz, Frank; Busch, Claudia; Stein, Matthias; Michel, Marvin D.; Würfel, Daniel; Lerch, Renee G.; Petermann, Martin; Geruschke, Thomas; Blaeser, Sebastian; Weyers, Sascha; Vogt, Holger


Andresen, Björn F. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Infrared Technology and Applications XLIV : 15 - 19 April 2018, Orlando, Florida, United States
Bellingham, WA: SPIE, 2018 (Proceedings of SPIE 10624)
Paper 1062419, 6 pp.
Conference on Infrared Technology and Applications <44, 2018, Orlando/Fla.>
Conference Paper
Fraunhofer IMS ()
uncooled infrared detector; IRFPA; QVGA; microbolometer; amorphous silicon; 17 µm pixel pitch; Sigma-Delta-ADC on chip

This paper presents the results of a high-performance digital QVGA-IRFPA based on uncooled microbolometers with a pixel-pitch of 17 μm and a chip-scale-package as the vacuum package developed and fabricated by Fraunhofer-IMS. Due to a direct conversion of the microbolometer’s resistance into a 16 bit value by the use of massively parallel on-chip Sigma-Delta-ADCs a high scene temperature dynamic range of more than 300 K and a very low NETD-value below 50 mK is achieved. Due to a broad-band antireflection coating the digital 17 μm QVGA-IRFPA achieves a high sensitivity in the LWIR (wavelength 8 μm to 14 μm) and MWIR (wavelength 3 μm to 5 μm) range. In this paper the microbolometer, the vacuum-packaging, the architecture of the readout electronics, and the electro-optical performance characterization will be presented.