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Roll-to-roll sputtering of oxide layers into ultrathin flexible glass

: Fahland, Matthias; Dietsch, Tina; Ottermann, Clemens; Zywitzki, Olaf; Linß, Volker

Schottner, G. ; International Council for Coatings on Glass e.V. -ICCG-; Fraunhofer-Institut für Silicatforschung -ISC-, Würzburg; Vincentz Network GmbH & Co. KG, Hannover:
Advanced coatings for large-area or high-volume products. The 12th International Conference on Coatings on Glass and Plastics : ICCG 12. CD-ROM : June 11-15, 2018, Conference Center Würzburg, Germany
Würzburg: Fraunhofer ISC, 2018
pp.51-53 (Session 1)
International Conference on Coatings on Glass and Plastics (ICCG) <12, 2018, Würzburg>
Conference Paper
Fraunhofer FEP ()
sputtering; rotatable magnetron; ITO; ultra-thin glass

Ultrathin flexible glass is a new material with fascinating properties. However, the handling of the glass as well as the reliable and cost effective deposition of coatings onto its surface are decisive for creating attractive application cases. Fraunhofer FEP and VON ARDENNE GmbH operate together a new roll-to-roll coating machine. This equipment is specifically designed for meeting the needs of this sensitive new type of substrate. Indium-tin-oxide coatings were deposited onto the glass while it is kept at elevated temperatures. This is realized by a heater array which can adjust temperature set points up to 350 °C. The sheet resistance and the resistivity of these layers were11 Ohm per square and 1.7 x10-4Ω·cm, respectively. The coated glass is destined for use as transparent electrodes inorganic light emitting diodes (OLED). The poster will demonstrate how the layer properties can be fine-tuned by the process parameters during the sputter deposition. The roughness and the structural properties of the layers will be presented apart from the opto-electronic properties.