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Flexible thin film bending sensor based on Bragg gratings in hybrid polymers

 
: Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf

:

Berghmans, F. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Sensing and Detection V : 22-26 April 2018, Strasbourg, France
Bellingham, WA: SPIE, 2018 (Proceedings of SPIE 10680)
Paper 106800P, 6 pp.
Conference "Optical Sensing and Detection" <5, 2018, Strasbourg>
Deutsche Forschungsgemeinschaft DFG
HE 5150/1-1
Bragg-Gitter-Sensoreni auf der Basis von Hybridpolymeren - Grundlegende Untersuchungen und Realisierung
Deutsche Forschungsgemeinschaft DFG
FR 713/10-1
Bragg-Gitter-Sensoreni auf der Basis von Hybridpolymeren - Grundlegende Untersuchungen und Realisierung
English
Conference Paper
Fraunhofer IISB ()

Abstract
We report on the fabrication of an optical, highly-flexible thin film bending sensor which is based on diffused channel waveguide Bragg gratings inscribed into sheets of OrmoStamp hybrid polymers. The inorganic-organic Ormocer thin films are prepared by non-structured UV-enhanced imprint lithography which allows the fabrication of sheet-like slab substrates with a desired thickness. By this approach, 120 μm thin and highly-flexible plane-parallel substrates are achieved. For the inscription of the diffused channel waveguide Bragg gratings, a fast and efficient single writing step concept is applied, which allows the simultaneous inscription of both waveguide and Bragg grating in only a few seconds. The accordingly fabricated waveguide Bragg gratings feature a defined Bragg reflection peak that lies within the telecom wavelength range and is well-suited for sensing applications that require a reliable detection and tracking of the reflected Bragg wavelength. The applicability of the thus achieved devices as highly-flexible thin film bending sensors is investigated by means of deflection measurements. Here, we found a quasi-instantaneous and highly-reproducible response of the diffused channel waveguide Bragg gratings reflected Bragg wavelength to even small deflections which features a linear dependency of 6.05E-4 nm/μm on the sensors displacement.

: http://publica.fraunhofer.de/documents/N-494087.html