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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Correlation analysis: A fast and reliable method for a better understanding of simulation models in optical lithography

 
: Tollkühn, B.; Heubner, A.; Elian, K.; Ruppenstein, B.; Erdmann, A.

:

Emami, I. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Data analysis and modeling for process control II : 3 - 4 March 2005, San Jose, California, USA
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5755)
ISBN: 0-8194-5735-3
pp.37-47
Conference "Data Analysis and Modeling for Process Control" <2, 2005, San Jose/Calif.>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-49254.html