Coating on the inside of microfluidic systems with DBD based atmospheric pressure PA-CVD

Dielectric barrier discharges at atmospheric pressure can be sustained in sub-mm cavities. These micro plasmas can be used for surface modifications of sealed microfluidic systems. With this technique coatings can be deposited and surface properties of microfluidics can be improved. Furthermore, the process allows to localize coatings to pre-select narrow channel segments, so that different surface tensions can be generated area-selectively, e.g. for hydrophobic stops in hydrophilic channels.