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Magnetron sputtering of precision optical coatings enabled by process stability of rotatable cathodes

: Bruns, S.; Vergöhl, M.; Zickenrott, T.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2016 : 19-24 June 2016, Tucson, Arizona, United States
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-13-2
Paper WA.1
Conference" Optical Interference Coatings" (OIC) <2016, Tucson/Ariz.>
Conference Paper
Fraunhofer IST ()

Cylindrical rotatable cathodes deliver huge material amounts under stable conditions as needed for interference coatings. Sub-stoichiometric targets and plasma oxidation produce low absorbance and virtually no drift of refractive index associated with changeless material uniformity.