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Precision optical coatings on large substrates by reactive magnetron sputtering

: Frach, P.; Glöß, D.; Bartzsch, H.; Goschurny, T.; Drescher, A.; Gottfried, C.; Liebig, J.-S.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2016 : 19-24 June 2016, Tucson, Arizona, United States
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-13-2
Paper WA.11
Conference" Optical Interference Coatings" (OIC) <2016, Tucson/Ariz.>
Conference Paper
Fraunhofer FEP ()

The upscaling of highly productive coating technologies for precison optics and appropriate equipment will be presented. The application for e.g. gradient coatings or special coatings for holographic 3D-displays will be shown.