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Investigation of the refractive index reproducibility for tantalum pentoxide coatings, prepared by PVD techniques

: Stenzel, O.; Wilbrandt, S.; Schürmann, M.; Kaiser, N.; Wolf, J.; Ristau, D.; Ehlers, H.; Carstens, F.; Schippel, S.; Mechold, L.; Rauhut, R.; Kennedy, M.; Bischoff, M.; Nowitzki, T.; Zöller, A.; Hagedorn, H.; Reus, H.; Hegemann, T.; Starke, K.; Harhausen, J.; Foest, R.; Schumacher, J.


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2016 : 19-24 June 2016, Tucson, Arizona, United States
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-13-2
Paper ThD.2
Conference" Optical Interference Coatings" (OIC) <2016, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()

Random effects in the reproducibility of refractive index and absorption edge position of Ta2O5 layers prepared by plasma-ion assisted electron beam evaporation, ion beam sputtering and magnetron sputtering are investigated and quantified.