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DUV-reflective coatings and novel actuator materials for light modulator arrays

Presentation held at the Photonics West Conference 2006, 21 - 26 January 2006, San Jose, California
 
: Schmidt, Jan-Uwe; Friedrichs, Martin; Sandner, Thilo; Heber, Jörg; Rudloff, Dirk; Lakner, Hubert; Yang, M.; Gatto, A.; Kaiser, Norbert

:
Fulltext urn:nbn:de:0011-n-490333 (4.0 MByte PDF)
MD5 Fingerprint: 08b8190f841ffc4c464985b63a6c3c4e
Created on: 18.11.2006


2006, 19 pp.
Photonics West Conference <2006, San Jose/Calif.>
English
Presentation, Electronic Publication
Fraunhofer IPMS ()
Fraunhofer IOF ()
MOEMS; DUV reflective coating; lithography; SLM; low-creep actuator

: http://publica.fraunhofer.de/documents/N-49033.html