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Low-creep metallic thin films and reflective coatings for optical microsystems

 
: Schmidt, J.U.; Gehner, A.; Knobbe, J.

European Joint Committee on Plasma and Ion Surface Engineering; Europäische Forschungsgesellschaft Dünne Schichten e.V. -EFDS-:
Proceedings of the 10th International Conference on Plasma Surface Engineering : Garmisch-Partenkirchen, Germany, September 10 - 15, 2006
Dresden: EFDS, 2006
International Conference on Plasma Surface Engineering (PSE) <10, 2006, Garmisch-Partenkirchen>
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-48818.html