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Checking surface modulation on metaloptics by analysing ultraprecision machines

: Weck, Manfred; Modemann, K.


Weck, M. ; Association Nationale de la Recherche Technique -ANRT-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April 1987, The Hague, The Netherlands; Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering
Bellingham/Wash.: SPIE, 1987 (Proceedings of SPIE 803)
ISBN: 0-89252-838-9
6 pp.
Conference "Micromachining of Elements with Optical and other Submicrometer Dimensional and Surface Specifications" <1987, The Hague>
International Symposium on Optical and Optoelectronic Applied Science and Engineering <4, 1987, The Hague>
Conference Paper
Fraunhofer IPT ()
spindles; modulation; optical component; micromachining; diamond; mirror; analytical research

The requirements for surface quality of workpieces such as metaloptics are increasing, specially if they are used as mirrors in high energy laser system- The precision of figure, slope errors, and surface roughness depend on the performance of the machining process. These facts determine the development of precision and ultraprecision machines. Various parameters influence workpiece quality machined with a single point diamond tool: machine behaviour, technology and environmental factors. esearch work. have demonstrated, that specially the static and dynamic behaviour of ultraprecision machines decisively determines optical surface quality. An improved measurement technique to analyse the static and dynamic behaviour of those machines is presented. The discussion of results from ultraprecision machine tests demonstrated, that it is possible to combine the measured vibration amplitude at the tool during the process with the generated surface texture on the workpiece. The goal of research work today is to find out a measuring approach of machined surfaces, which contents the analysing of the machine tool behaviour. The man in the shop floor will be able to improve the machining process by comparing real and synthetic interferograms. Checking systematic interferogram lists, which content advices of faulty machining parameters, it is possible to get get informations, how to change the machining parameters.