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The geometrical and dynamical behaviour of ultraprecision diamond turning machines set limits to the workpiece accuracy

 
: Weck, Manfred; Hartel, R.; Bispink, T.

:

Langenbeck, Peter ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining optical components and precision engineering : 22-23 September 1988, Hamburg
Bellingham, WA: SPIE, 1989 (Proceedings of SPIE 1015)
ISBN: 0-8194-0050-5
10 pp.
Conference "Micromachining Optical Components and Precision Engineering" <1988, Hamburg>
English
Conference Paper
Fraunhofer IPT ()
error analysis; spindles; micromachining; optical component; mirror; transducer; interferometer

Abstract
The influences of straightness errors and machine resonances on the surface of faced mirrors are discussed. Measurement results of the machine behaviour are compared with the surface shapes and micro-structure of produced workpieces. A correlation between the measurement results of the machine and the analysed workpiece surfaces is presented in this paper.

: http://publica.fraunhofer.de/documents/N-487710.html