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110 GHz on-wafer measurement comparison on alumina substrate

: Probst, Thorsten; Doerner, Ralf; Ohlrogge, Matthias; Lozar, Roger; Arz, Uwe


Ginley, R. ; Institute of Electrical and Electronics Engineers -IEEE-; IEEE Microwave Theory and Techniques Society:
90th ARFTG Microwave Measurement Conference 2017 : November 30th-December 1st, 2017, St. Julien Hotel, Boulder, Colorado
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5386-4356-3
ISBN: 978-1-5386-4355-6
ISBN: 978-1-5386-4357-0
Microwave Measurement Conference <90, 2017, Boulder/Colo.>
Conference Paper
Fraunhofer IAF ()
on-wafer; calibration; substrate; probe

This paper reports on initial results of a three-party on-wafer measurement comparison carried out on a custommade alumina calibration substrate in the frequency range up to 110 GHz. The correction of the vector network analyzer measurement is done with the highly accurate multiline TRL (mTRL) calibration. The focus of the investigation is on the influence of the measurement system, the probe geometry and operator skills. The results of the calibrations are presented and the influence on selected devices under tests (DUT) are evaluated for different measurement configurations.