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Generation of design structures by selective polishing with laser radiation

 
: Kiedrowski, T.; Willenborg, E.; Wissenbach, K.; Hack, S.

Beyer, E. ; Wissenschaftliche Gesellschaft Lasertechnik -WLT-:
Lasers in manufacturing 2005 : Proceedings of the Third International WLT-Conference Lasers in Manufacturing, LIM 2005; Munich, Germany, June 13th - 16th, 2005
Stuttgart: AT-Fachverlag, 2005
ISBN: 3-00-016402-2
pp.451-455
International Conference on Lasers in Manufacturing <3, 2005, München>
English
Conference Paper
Fraunhofer ILT ()

: http://publica.fraunhofer.de/documents/N-48552.html