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Simplified resist models for efficient simulation of contact holes and line ends

 
: Tollkühn, B.; Erdmann, A.; Semmler, A.; Nölscher, C.

:

Kruit, P.:
Micro and Nano Engineering 2004. Proceedings of the 30th International Conference on Micro and Nano Engineering : September 19 - 22, 2004, Rotterdam, The Netherlands
Amsterdam: Elsevier, 2005 (Microelectronic engineering 78/79.2005)
pp.509-514
International Conference on Micro and Nano Engineering (MNE) <30, 2004, Rotterdam>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-48062.html