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Terahertz imaging tackles solar cell and semiconductor process inspection

 
: Nagel, M.; Sawallich, S.; Globisch, B.

Laser focus world 53 (2017), No.10, pp.27-30
ISSN: 0740-2511
ISSN: 1043-8092
English
Journal Article
Fraunhofer HHI ()

Abstract
Replacing free-space optics with fiber-coupled, integrated components allows modular terahertz time-domain imaging systems to excel in solar and semiconductor wafer analysis.

: http://publica.fraunhofer.de/documents/N-480419.html