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Evaluation of an electrochemical corrosion technique for the determination of static etch rates of post CMP cleaning chemicals

Presentation held at 8th WET Users Meeting 2017, 6th April 2017, Dublin, Irland
 
: Krause, Robert; Koch, Johannes; Rehschuh, Stephan; Naue, Johannes; Bott, Sascha; Uhlig, Benjamin; Vasilev, Boris

2017, 14 Folien
WET Users Meeting <8, 2017, Dublin>
English
Presentation
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-480197.html