Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Layer by layer deposition of colloidal SnO2 nano particles

: Gao, Haitao; Lyu, Xuemeng; Wöllenstein, Jürgen; Palzer, Stefan

Fulltext (PDF; )

Proceedings. MDPI AG 1 (2017), No.4, Art. 318, 3 pp.
ISSN: 2504-3900
Eurosensors Conference <31, 2017, Paris>
Journal Article, Conference Paper, Electronic Publication
Fraunhofer IPM ()
tin oxide; colloidal dispersion; inkjet printing; nano-micro integration; MEMS

The gas sensing properties of functional metal oxide layers depend on multitude parameters, including vacancy concentration, layer morphology and thickness, size and shape of the nano/microstructure, and porosity. Using colloidal tin oxide inks we demonstrate a layer by layer deposition technique to control the thickness and composition of gas sensitive layers. To do this we combine inkjet-printing with colloidal suspensions of SnO2 particles to provide a scalable method to interface microelectromechanical systems (MEMS) with nano particles. The approach may pave the way towards an industry ready integration technique to incorporate gas sensitive quantum dots or hybrid nanomaterials in arbitrary sensing devices.