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Atomic layer deposition of lithium titanate on planar and 3D-structured 200 mm silicon substrates

Presentation held at 17th International Conference on Atomic Layer Deposition, ALD 2017, 15th - 18th July 2017, Denver, Colorado, USA
 
: Bönhardt, Sascha

2017, 17 Folien
International Conference on Atomic Layer Deposition (ALD) <17, 2017, Denver/Colo.>
English
Presentation
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-480116.html