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PEALD and pulsed CVD of Cobalt thin films using the precursor cyclopentadienylcobalt dicarbonyl

Poster presented at Joint EuroCVD 21 - Baltic ALD 15 Conference, 11 - 14 June 2017, Linköping, Sweden
 
: Hossbach, Christoph; Shukla, Shashank; Fischer, Dustin; Reif, Johanna; Bönhardt, Sascha; Geidel, Marion; Albert, Matthias; Bartha, Johann W.

2017, 1 Folie
European Conference on Chemical Vapor Deposition (EuroCVD) <21, 2017, Linköping>
Baltic ALD Conference <15, 2017, Linköping>
English
Poster
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-480114.html