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Experimental case studies acc. to ISO 14644-15: From ACC contamination being emitted from material and equipment via the planning phase to finally realized cleanroom settings

: Keller, Markus; Gommel, Udo

Fulltext urn:nbn:de:0011-n-4772875 (438 KByte PDF)
MD5 Fingerprint: 66718b0f605b2aac499c6463b78a187c
Created on: 3.1.2018

International Confederation of Contamination Control Societies -ICCCS-; Sociedade Brasileira de Controle de Contaminação:
ISCC 2016, 23rd International Symposium on Contamination Control : 20th to 23rd September 2016, São Paulo, Brazil
São Paulo, 2016
7 pp.
International Symposium on Contamination Control (ISCC) <23, 2016, São Paulo>
Conference Paper, Electronic Publication
Fraunhofer IPA ()
Reinraumtechnik; Kontaminationsüberwachung; Reinraumtauglichkeit; Reinraumanwendung; Kontaminationsminimierung; Airborne Contamination by Chemicals (ACC); Airborne contamination; Airborne Molecular Contamination (AMC); Volatile Organic Compounds (VOC); assessment

Chemical contamination is becoming an increasingly important issue in controlled production environments for space, semiconductor and medical device industries. The contamination concerned may be caused by the adsorption of chemical compounds in gaseous form. Many equipment and materials emit gaseous chemical substances into the atmosphere that lead to chemical surface contamination with major consequences for industrial processes. These airborne contaminations by chemicals (ACC) have to be reduced to a minimum. In consequence, the requirements for cleanrooms with a defined high degree of chemical indoor air quality (IAQ) are constantly rising. The IAQ in a cleanroom is mainly influenced by the ACC outgassing contamination potential of used equipment and materials.
Therefore, equipment and materials implemented in selected industries need to be assessed for ACC emissions and classified in order to permit direct comparisons to be made and to select equipment and material without any emission of process critical contaminations, such as volatile organic compounds (VOC), acids, bases, phthalates, siloxanes and organophosphates.
The newly released standard ISO 14644-15 (draft) defines different measurement scenarios for material and equipment and describes the sampling and analysis of ACC.
Material emission testing is done using an emission chamber, mainly with a micro scale emission cell. Emission testing of equipment is performed either in a large scale emission chamber or in an ACC-filtered cleanroom setting. Subsequent analysis is performed via thermal desorption coupled with gas chromatography and mass spectrometry (ATD-GC/MS) or ion chromatography (IC) or other suitable measurement techniques.
The resulting equipment or material classification enables a selection already in the planning phase of a cleanroom. Finally ISO 14644-15 (draft) describes a prediction model for cleanroom settings enables the user to estimate the expected ACC-level of the environment to be constructed depending on the selected materials and equipment.