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Six-layer lamination of a new dry film negative-tone photoresist for fabricating complex 3D microfluidic devices

: El Hasni, Akram; Pfirrmann, Stefan; Kolander, Anett; Yacoub-George, Erwin; König, Martin; Landesberger, Christof; Voigt, Anja; Grützner, Gabi; Schnakenberg, Uwe


Microfluidics and nanofluidics 21 (2017), Art. 41, 9 pp.
ISSN: 1613-4982
ISSN: 1613-4990
Bundesministerium für Wirtschaft und Technologie BMWi
ZIM; KF2830903CK3; LamiRes
Journal Article
Fraunhofer EMFT ()
microfluidic; flow focusing; dry film photoresist; microfabrication

We present a new epoxy-based negative-tone dry film photoresist (DFR) for fabricating multilayer microfluidic devices using a lamination process combined with a standard photolithography technology. As proof-of-concept, a complex 3D-hydrodynamic focusing device was produced via a six-layer lamination process of 33 µm-thick DFR layers. The bonding strength of the new DFR was tested on silicon, glass, and titanium substrates, respectively. A maximum bonding strength of 37 MPa was obtained for the dry film photoresist laminated on glass. No leakage was found, and burst tests proved excellent robustness and sealing reliability of the microchannels.