Recent developments in the industrial silicon heterojunction process chain enabling efficiencies up to 22.7%

Silicon Heterojunction (SHJ) solar cells represent a key technology to approach very high conversion efficiencies close to the theoretical limit of silicon solar cells. The main advantages of SHJ solar cells are a lean production chain with low temperature processes and carrier selective hetero-structure for excellent passivation. This paper focuses on the implementation of partially new, alternative, cost effective and production-feasible process steps as ozone-based cleaning, inline PECVD and screen printing in the Silicon Heterojunction process chain enabling efficiencies up to 22.7%.