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Recent developments in the industrial silicon heterojunction process chain enabling efficiencies up to 22.7%

: Moldovan, A.; Fischer, A.; Temmler, J.; Bivour, M.; Dannenberg, T.; Erath, D.; Lorenz, A.; Sontag, D.; Zhao, J.; Wissen, A.; Clement, F.; Zimmer, M.; Rentsch, J.

Fulltext ()

Energy Procedia 124 (2017), pp.357-364
ISSN: 1876-6102
International Conference on Crystalline Silicon Photovoltaics (SiliconPV) <7, 2017, Freiburg>
Conference Paper, Journal Article, Electronic Publication
Fraunhofer ISE ()

Silicon Heterojunction (SHJ) solar cells represent a key technology to approach very high conversion efficiencies close to the theoretical limit of silicon solar cells. The main advantages of SHJ solar cells are a lean production chain with low temperature processes and carrier selective hetero-structure for excellent passivation. This paper focuses on the implementation of partially new, alternative, cost effective and production-feasible process steps as ozone-based cleaning, inline PECVD and screen printing in the Silicon Heterojunction process chain enabling efficiencies up to 22.7%.