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Novel concept of integrated micro actuation of membranes in liquid environments

 
: Stiehl, C.; Enderlein, T.; Nestler, J.; Otto, T.

Otto, T. ; Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Smart Systems Integration 2017 : International Conference and Exhibition on Integration Issues of Miniaturized Systems, 8 - 9 March 2017, Cork, Ireland
Auerbach /Vogtl.: Verlag Wissenschaftliche Scripten, 2017
ISBN: 978-3-95735-057-2
ISBN: 3-95735-057-3
pp.487-490
International Conference and Exhibition on Integration Issues of Miniaturized Systems <2017, Cork>
English
Conference Paper
Fraunhofer ENAS ()

Abstract
The paper presents two different approaches of utilizing electrolytic micro actuation in liquid environments. As a first approach the electrolytic generation of gas is used to generate a gas pressure which leads to a deformation of a membrane. The membrane deformation is then used to displace liquids, allowing for performing biological assay a time-controlled way. The second approach utilizes the electrochemical dissolving of a sacrificial layer underneath a strained membrane, resulting in a controlled in-situ generation rolled-up micro tubes inside microfluidic channels.

: http://publica.fraunhofer.de/documents/N-473878.html