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Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring

: Bertke, M.; Wu, W.; Wasisto, H.S.; Uhde, E.; Peiner, E.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society:
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 : 18-22 June 2017, Kaohsiung, Taiwan
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5386-2732-7
ISBN: 978-1-5386-2733-4
ISBN: 978-1-5386-2731-0
International Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS) <19, 2017, Kaohsiung/Taiwan>
Conference Paper
Fraunhofer WKI ()
resonant; balance; particulate; mass; direct-reading; sizer; portable; overloading refreshing; electrothermal; piezoresistive; in-plane

This paper reports the size-selective sampling and removal of airborne nanoparticles (NP) using a silicon resonant micro cantilever mass balance combined with a miniaturized electrostatic precipitator (ESP). This allows to design an overnight-refreshable, pocket-sized, autarkic monitor for NP mass concentration and size in the range below 300 nm.