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FEA to Tackle Damage and Cracking Risks in BEoL Structures under Copper Wire Bonding Impact

: Auersperg, J.; Breuer, D.; Machani, K.V.; Rzepka, S.; Michel, B.

Fulltext ()

Schulz, S.E.:
AMC 2015, Advanced Metallization Conference
Chemnitz: Universitätsverlag Chemnitz, 2015
ISBN: 978-3-944640-97-6
3 pp.
Advanced Metallization Conference (AMC) <32, 2015, Austin/Tex.>
Conference Paper, Electronic Publication
Fraunhofer ENAS ()

With the recent increase in Gold (Au) wire cost Copper (Cu) wire becomes an attractive way to manage overall package cost. On the other hand, Copper wire bonding introduces much higher mechanical impact to underlying BEoL structures and actives because of the higher stiffness and lower ductility of Copper compared to Gold. These trends are accompanied by the application of new porous or nano-particle filled materials like low-k and ultra low-k materials for Back-end of Line (BEoL) layers of advanced CMOS technologies. As a result, higher delamination and cracking risks in BEoL structures underneath bonded areas represent an increasing challenge for the thermo-mechanical reliability requirements. To overcome the related reliability issues the authors performed a two level nonlinear FEM-simulation approach. Initially nonlinear axi-symmetric modeling and simulation of the copper bonding process are coupled with a spatial simulation model of the whole BeoL and bond pad structure. Cracking and delamination risks are estimated by a surface based cohesive contact approach and the utilization of a crushing foam constitutive material model for ultra low-k materials.