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2D PIC-MC Simulation of Reactive Dual Magnetron Discharges on Ti02
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2014
Conference Paper
Titel
2D PIC-MC Simulation of Reactive Dual Magnetron Discharges on Ti02
Author(s)
Melzig, T.
Siemers, M.
Pflug, A.
Hauptwerk
Society of Vacuum Coaters. 57th Annual Technical Conference 2014
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 2014
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST