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2D PIC-MC Simulation of Reactive Dual Magnetron Discharges on Ti02

 
: Melzig, T.; Siemers, M.; Pflug, A.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 57th Annual Technical Conference 2014 : Chicago, USA, 03. - 09. Mai 2014
Albuquerque: SVC, 2014
ISBN: 978-1-878068-34-7
pp.174-178
Society of Vacuum Coaters (Annual Technical Conference) <57, 2014, Chicago/Ill.>
English
Conference Paper
Fraunhofer IST ()

: http://publica.fraunhofer.de/documents/N-473197.html