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Magnetically driven energy-harvester with monolithically integrated high-energy-density magnets

: Lofink, F.; Tolstrup, V.; Lisec, T.; Reimer, T.; Piorra, A.; Meyners, D.; Quandt, E.; Wagner, B.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society:
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 : 18-22 June 2017, Kaohsiung, Taiwan
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5386-2732-7
ISBN: 978-1-5386-2733-4
ISBN: 978-1-5386-2731-0
International Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS) <19, 2017, Kaohsiung/Taiwan>
Conference Paper
Fraunhofer ISIT ()

This paper presents the first piezoelectric MEMS energy-harvester with monolithically integrated fully back-end-of-line compatible high-energy-density micromagnets. At resonance a power output of up to 20 μW is reported which is by orders of magnitude higher than state-of-the-art magnetic MEMS harvesters. Due to the high energy density and large volume of the integrated micromagnets the harvester exhibits a high area-normalized power output of about 5 μW/mm2.