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MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material

: Lisec, T.; Stoppel, F.; Kaden, D.; Heinrich, F.; Neumann, A.; Wagner, B.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society:
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 : 18-22 June 2017, Kaohsiung, Taiwan
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5386-2732-7
ISBN: 978-1-5386-2733-4
ISBN: 978-1-5386-2731-0
International Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS) <19, 2017, Kaohsiung/Taiwan>
Conference Paper
Fraunhofer ISIT ()

Ohmic MEMS switches can be operated reliable under DC load if important factors determining its reliability are considered as a whole. First of all, these are bi-directional actuation with high forces, a very low contact resistance and good heat dissipation. The present work describes the reliability of a surface-micromachined ohmic switch with gold contacts, combining all this features. Hot switching of 50mA at 10Vdc is possible in ambient air for more than 50 million cycles. With a load of 10mA more than 100 million cycles have been demonstrated repeatedly.