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Charge sensitive fluid sensor for chemical and biological applications

: Heigl, M.; Neumeier, K.; Spitzlsperger, G.; Kutter, C.; Eisele, I.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society:
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 : 18-22 June 2017, Kaohsiung, Taiwan
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5386-2732-7
ISBN: 978-1-5386-2733-4
ISBN: 978-1-5386-2731-0
International Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS) <19, 2017, Kaohsiung/Taiwan>
Conference Paper
Fraunhofer EMFT ()

A new field-effect transistor based transducer concept is presented, for measuring both, liquid and gaseous media. It uses a Faraday cup with a floating electrode inside, which is connected to the gate of a MOS like transistor. The SOI based technological realization allows a new degree of freedom for more flexible measurements as compared to conventional FET based transducers. Potentiometric measurements are presented. Additionally the SOI technology allows simple packaging.