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Investigations into the wear of a WL10 ion source

 
: Häublein, V.; Sadrawetz, S.; Frey, L.; Martinz, H.-P.; Ryssel, H.

:

Chen, L.J.:
Ion implantation technology. Proceedings of the 15th International Conference on Ion Implantation Technology 2004 : 25 - 27 October 2004, Taipei, Taiwan, Republic of China
Amsterdam: North-Holland, 2005 (Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms 237.2005,1/2)
pp.341-345
International Conference on Ion Implantation Technology (IIT) <15, 2004, Taipei>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-46656.html