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Development of micro batteries based on micro fluidic MEMS packaging

: Hahn, R.; Ferch, M.; Hoeppner, K.; Queisser, M.; Marquardt, K.; Elia, G.A.


Charlot, B. ; Institute of Electrical and Electronics Engineers -IEEE-:
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017. Collection of papers : Bordeaux, France, May 29th-June 1st, 2017
Piscataway, NJ: IEEE, 2017
ISBN: 978-1-5386-2952-9
ISBN: 978-1-5386-2953-6
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) <2017, Bordeaux>
Conference Paper
Fraunhofer IZM ()

A cost effective and reliable technology allowing extreme miniaturization of batteries into silicon, glass chips and electronic packages has been developed, employing a dispense-print process for battery electrodes and liquid electrolyte. Lithium-ion micro batteries (active area 6×8 mm2, 0.2-0.4 mAh) with interdigitated electrodes and glass housing were fabricated, tested and finally compared with the traditional battery architecture of stacked electrodes. All processes for micro battery fabrication were established; in particular a micro fluidic electrolyte filling process that allows simultaneous electrolyte supply of all cells on a planar substrate. Electrode mass reproducibility was sufficient for adequate electrode balancing. Current capability similar to the conventional face-to-face electrode configuration was achieved with interdigital electrodes. The cells were successfully cycled; several 100 cycles can be achieved.