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Encapsulation of optical gratings using nanoporous alumina layers

 
: Ghazaryan, Lilit; Kley, Ernst-Bernhard; Szeghalmi, Adriana

Asian journal of physics : an international quarterly research journal 25 (2016), No.2, pp.7-8
ISSN: 0971-3093
English
Journal Article
Fraunhofer IOF ()

Abstract
In this work, we describe a method to encapsulate optical gratings with nanoporous Al2O3. The encapsulation process consists of covering a grating, filled with a sacrificial material, by an organic-inorganic thin alucone layer. The element is than heated up to 400 °C to remove the organic component from the alucone film. The nanoporous Al2O3 film, formed after the removal of the organic component acts as a diffusion layer for the decomposition products of the sacrificial material. The complete removal of the sacrificial material was confirmed by energy dispersive x-ray spectroscopy (EDX).

: http://publica.fraunhofer.de/documents/N-461969.html