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Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization

 
: Steenhusen, Sönke; Hasselmann, Sebastian; Domann, Gerhard

:

Freymann, G. von ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X : San Francisco, California, United States, 29 January-1 February 2017
Bellingham, WA: SPIE, 2017 (SPIE Proceedings Series 10115)
ISBN: 978-1-5106-0671-5
ISBN: 978-1-5106-0672-2
Paper 101150S, 9 pp.
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" <10, 2017, San Francisco/Calif.>
English
Conference Paper
Fraunhofer ISC ()
3D-Druck; Additive Fertigung; Laserbearbeitung; Lithographie; Mikrooptik; Mikrolinsen; Polymere; Rasterelektronenmikroskopie (REM)

: http://publica.fraunhofer.de/documents/N-461735.html