Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Innovative stationary and in-line sputter technologies for precision optical coatings

 
: Frach, P.; Bartzsch, H.; Liebig, J.

Kusano, E.:
Selected Papers Revised from the Proceedings of the Eighth International Symposium on Sputtering and Plasma Processes, ISSP 2005 : 8 - 10 June 2005, Kanazawa, Japan
New York, NY: Pergamon, 2006 (Vacuum 80.2006,Nr.7)
pp.265-269
International Symposium on Sputtering and Plasma Processes (ISSP) <8, 2005, Kanazawa>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-45631.html