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PVD and ALD process development of advanced oxide-based RRAM-stacks

 
: Kalishetthyhalli Mahadevaiah, Mamathamba
: Müller, Johannes; Lakner, Hubert; Fischer, Wolf-Joachim

Dresden, 2017, XXI, 110 pp.
Dresden, TU, Master Thesis, 2017
English
Master Thesis
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-456143.html